Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors
- Creator: Ruppert, Michael G. , Fleming, Andrew J. , Yong, Yuen K.
- Resource Type: journal article
- Date: 2021
Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing
- Creator: Ruppert, Michael G. , Moore, Steven I. , Zawierta, Michal , Fleming, Andrew J. , Putrino, Gino , Yong, Yuen K.
- Resource Type: journal article
- Date: 2019
On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach
- Creator: Ruppert, Michael G. , Fowler, Anthony G. , Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2017
Instrumentation techniques for the control of MEMS nanopositioners
- Creator: Moore, Steven
- Resource Type: thesis
- Date: 2016
A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control
- Creator: Maroufi, Mohammad , Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices
- Creator: Fowler, A. G. , Moheimani, S. O. R. , Behrens, S.
- Resource Type: conference paper
- Date: 2013
Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza , Behrens, Sam
- Resource Type: journal article
- Date: 2013
Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing
- Creator: Zhu, Yong , Bazaei, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2011
A micromachined nanopositioner with on-chip electrothermal actuation and sensing
- Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010
Ultrasonic energy transmission and conversion using a 2-D MEMS resonator
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010